Precision Air & Cooling Control
HVAC for reliability in advanced semiconductor fabs.
HVAC is no longer a background utility
In advanced semiconductor manufacturing, HVAC is a precision control system that directly impacts yield, uptime, and tool performance.
As fabs scale to support advanced nodes and AI-driven production, requirements for temperature stability, airflow uniformity, humidity control, and airborne molecular contamination (AMC) are tightening simultaneously.
- Advanced nodes increase sensitivity to temperature, humidity, and airflow deviation
- Higher tool density and energy intensity compress operational tolerances
- Data centre direct-to-chip cooling now demands semiconductor-level thermal precision
HVAC performance is inseparable from fab reliability.
Who attends
Engineers from every facility discipline, and the manufacturers they serve.
HVAC, Gas & Exhaust Agenda
Selected by the independent Technical Advisory Committee - cooling, airflow, AMC, exhaust, and emissions abatement, grounded in real fab experience.
Testimonials
Why UltraFacility
Where HVAC is measured in wafer loss, not comfort metrics.
- Curated by the people who run the fabs. Intel, GlobalFoundries, Samsung Austin Semiconductor and Micron shape the agenda around real facility challenges.
- 50+ non-commercial presentations, selected from 100+ abstracts by an independent committee. Data, not sales pitches.
- HVAC, in its full yield context. Performance measured in wafer loss, downtime, and long-term reliability - alongside UPW, power, chemicals and wastewater on the same agenda.
- Direct line to the specifiers. The one forum where HVAC systems vendors meet the engineers specifying next-generation fab infrastructure.
Be in the room where fab HVAC's hardest problems get solved
UltraFacility 2026 expands semiconductor HVAC content across the whole conference - curated discussions on 16 September and core technical sessions on 17-18 September.
UltraFacility 2026 · 16-18 September · Phoenix, Arizona