Abatement as Critical Infrastructure
Gas exhaust and emissions in advanced semiconductor manufacturing.
A narrowing margin for error
As semiconductor manufacturing advances toward AI-driven nodes and giga-facilities, advanced processes introduce new chemistries and higher flow rates - while regulatory pressure and community scrutiny intensify.
The result is a narrowing margin for error: failures in exhaust or abatement now translate directly into tool downtime, yield loss, and operational risk.
- Advanced nodes increase chemical complexity and exhaust variability
- Higher utilisation and tool density amplify failure consequences
- Regulatory and environmental constraints evolve alongside production growth
Exhaust and abatement performance is no longer about meeting limits - it is about keeping fabs running.
Who attends
Engineers from every facility discipline, and the manufacturers they serve.
Gas, Exhaust & Abatement Agenda
Selected by the independent Technical Advisory Committee - emissions reduction, exhaust monitoring, PFAS volatiles, and abatement reliability, grounded in real fab experience.
Testimonials
Why UltraFacility
Where abatement is measured in uptime, not just thresholds.
- Curated by the people who run the fabs. Intel, GlobalFoundries, Samsung Austin Semiconductor and Micron shape the agenda around real facility challenges.
- 50+ non-commercial presentations, selected from 100+ abstracts by an independent committee. Data, not sales pitches.
- Abatement, in its reliability context. Performance measured in uptime, tool availability, and long-term operational resilience - not just emissions thresholds.
- Direct line to the fab community. The one conference connecting exhaust and abatement specialists with the facility engineers tackling reliability, scalability, and compliance under uncertainty.
Be in the room where the fab's hardest emissions problems get solved
UltraFacility 2026 expands gas exhaust and abatement content across the whole conference - curated discussions on 16 September and core technical sessions on 17-18 September.
UltraFacility 2026 · 16-18 September · Phoenix, Arizona