Precision Air & Cooling Control
HVAC for Reliability in Advanced Semiconductor Fabs
The Mission
In advanced semiconductor manufacturing, HVAC is no longer a background utility. It is a precision control system that directly impacts yield, uptime, and tool performance.
As fabs scale to support advanced nodes and AI-driven production, requirements for temperature stability, airflow uniformity, humidity control, and airborne molecular contamination (AMC) are tightening simultaneously.
- Advanced nodes increase sensitivity to temperature, humidity, and airflow deviation
- Higher tool density and energy intensity compress operational tolerances
HVAC performance is inseparable from fab reliability.
Great exchange - valuable networking.
Mirko Heinze
COO Water Treatment
DAS Environmental Expert GmbH
Attending the technical conference was an enriching experience. One of the highlights was the showcase of innovative technology, allowing participants to explore cutting-edge advancements.
Cecilia Boon Chia Hui
Principal Water Engineer
Micron Technology
The best UltraFacility to date. The venue was excellent, great attendance and the papers were high quality. Good presence by the industry supply chain and great to see so many HVM Semiconductor.
Gary Van Schooneveld
President
CT Associates
What You’ll See
Semiconductor HVAC content focuses on risk management and sustainability — grounded in real fab experience.
Examples of presentations and roundtables from 2025 include:
Critical sensor strategies: Best known methods to manage risks and limitations of sensors to ensure uninterrupted HVAC system performance
by
Smarter Cooling for Smarter Chips: Data-driven Optimization of Cooling Towers in Semiconductor Facilities
by
Chiller Plant Optimization for Semiconductor Manufacturing: A Data-Driven Approach for Closed-loop Operation
by
Who Attends
UltraFacility conference attendance is notable for two things: engineers and experts join from across all major facility disciplines, and semiconductor manufacturers represent a substantial portion of delegates – 10% of the total.
Join 850+ partners, clients, and competitors in Phoenix this September.
Past attendees: HVAC
Past attendees: Semiconductor Manufacturing
Confirmed Speakers
Experts in high purity chemicals are contributing across data-driven technical presentations, roundtables, workshops, and poster sessions.
Alan Knapp
Senior Director, Microelectronics Market
Xylem
Alan Knapp
Senior Director, Microelectronics Market
Xylem
Alan Knapp
Senior Director, Microelectronics Market
Xylem
Alan Knapp
Senior Director, Microelectronics Market
Xylem
Alan Knapp
Senior Director, Microelectronics Market
Xylem
Alan Knapp
Senior Director, Microelectronics Market
Xylem
Why UltraFacility
UltraFacility is the only technical conference where semiconductor HVAC is addressed in its full facility and yield context — where performance is measured in wafer loss, downtime, and long-term reliability, not comfort or energy metrics.
- End user partners at Intel, GlobalFoundries, Samsung Austin Semiconductor, and Micron shape the agenda — real facility challenges, not vendor pitches
- 50+ non-commercial, data-driven presentations selected from 100+ abstracts by an independent co-moderating team
- 80+ semiconductor manufacturers on the delegate list — 10% of total attendance
- The only forum connecting HVAC systems vendors directly with the engineers specifying next-generation fab infrastructure
Get Involved
UltraFacility 2026 will expand semiconductor HVAC content across the entire conference, including curated discussions on 16 September and core technical sessions on 17 and 18 September, with increased focus on precision control, contamination risk, and reliability at scale. If you have solutions in this area, the semiconductor manufacturing companies we work with want to hear them.
Opportunities include:
- Submit a technical abstract
Abstracts make up the technical presentations that are the core of the UltraFacility conference agenda. Present your solutions to 850+ experts this September – Submit an abstract today. - Join as a speaker in the HVAC workshop
One of many interactive workshop across the 16th September pre-conference agenda, speaker positions offer the chance to share findings and expertise across focused, HVAC-specific panels and roundtables – Get in touch about speaking positions here.
- Become a mission partner
Position your brand as an industry leader with a range of highly select opportunities to showcase expertise and engage with a targeted audience of facility professionals – Get in touch with our team today.
Speaking opportunities are curated in collaboration with our independent Technical Advisory Committee to ensure relevance, balance, and technical depth.
UltraFacility 2026 | 16-18 September | Phoenix, Arizona
