Abatement as Critical Infrastructure
Gas Exhaust and Emissions in Advanced Semiconductor Manufacturing
The Mission
As semiconductor manufacturing advances toward AI-driven nodes and giga-facilities, advanced processes introduce new chemistries and higher flow rates. At the same time, regulatory pressure and community scrutiny are intensifying.
The result is a narrowing margin for error: failures in exhaust or abatement now translate directly into tool downtime, yield loss, and operational risk.
- Advanced nodes increase chemical complexity and exhaust variability
- Higher utilisation and tool density amplify failure consequences
- Regulatory and environmental constraints evolve alongside production growth
Exhaust and abatement performance is no longer about meeting limits — it is about keeping fabs running.
Great exchange - valuable networking.
Mirko Heinze
COO Water Treatment
DAS Environmental Expert GmbH
Attending the technical conference was an enriching experience. One of the highlights was the showcase of innovative technology, allowing participants to explore cutting-edge advancements.
Cecilia Boon Chia Hui
Principal Water Engineer
Micron Technology
The best UltraFacility to date. The venue was excellent, great attendance and the papers were high quality. Good presence by the industry supply chain and great to see so many HVM Semiconductor.
Gary Van Schooneveld
President
CT Associates
What You’ll See
Content focuses on real-world exhaust and abatement challenges encountered in advanced fabs.
Examples of presentations and roundtables from 2025 include:
On-site generation of ammonium hydroxide
by
Criticality of modern analytical techniques in semiconductor-grade IPA analysis: Impacts of construction material compatibility and supply chain conditions on product integrity
by
Material Selection and Purity Control in Corrosive Solvent Distribution and Collection Systems
by
Who Attends
UltraFacility conference attendance is notable for two things: engineers and experts join from across all major facility disciplines, and semiconductor manufacturers represent a substantial portion of delegates – 10% of the total.
Join 850+ partners, clients, and competitors in Phoenix this September.
Past attendees: Gas Exhaust, Emissions & Abatement
Past attendees: Semiconductor Manufacturing
Confirmed Speakers
Gas exhaust and abatement experts are contributing across data-driven technical presentations, roundtables, workshops, and poster sessions.
Alan Knapp
Senior Director, Microelectronics Market
Xylem
Alan Knapp
Senior Director, Microelectronics Market
Xylem
Alan Knapp
Senior Director, Microelectronics Market
Xylem
Alan Knapp
Senior Director, Microelectronics Market
Xylem
Alan Knapp
Senior Director, Microelectronics Market
Xylem
Alan Knapp
Senior Director, Microelectronics Market
Xylem
Why UltraFacility
UltraFacility is the only technical conference where gas exhaust and abatement is addressed in its full facility-level reliability context — where performance is measured in uptime, tool availability, and long-term operational resilience, not just emissions thresholds.
- End user partners at Intel, GlobalFoundries, Samsung Austin Semiconductor, and Micron shape the agenda — real facility challenges, not vendor pitches
- 50+ non-commercial, data-driven presentations selected from 100+ abstracts by an independent co-moderating team
- 80+ semiconductor manufacturers on the delegate list — 10% of total attendance
- The only conference connecting exhaust and abatement specialists with the broader facility engineering community tackling reliability, scalability, and compliance under uncertainty
Get Involved
UltraFacility 2026 will expand gas exhaust and abatement content across the entire conference, including curated discussions on 16 September and core technical sessions on 17 and 18 September, with increased focus on reliability, scalability, and compliance under uncertainty. If you have solutions in this area, the semiconductor manufacturing companies we work with want to hear them.
Opportunities include:
- Submit a technical abstract
Abstracts make up the technical presentations that are the core of the UltraFacility conference agenda. Present your solutions to 850+ experts this September – Submit an abstract today. - Join as a speaker in the Gas Exhaust & Abatement workshop
One of many interactive workshop across the 16th September pre-conference agenda, speaker positions offer the chance to share findings and expertise across focused, gas exhaust and emission-specific panels and roundtables – Get in touch about speaking positions here.
- Become a mission partner
Position your brand as an industry leader with a range of highly select opportunities to showcase expertise and engage with a targeted audience of facility professionals – Get in touch with our team today.
Speaking opportunities are curated in collaboration with our independent Technical Advisory Committee to ensure relevance, balance, and technical depth.
UltraFacility 2026 | 16-18 September | Phoenix, Arizona
